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Jeffrey Bokor
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Field-effect transistor
Interferometry
Silicon
Annealing
International System of Units
Leakage
Carbon nanotube
Doping
Extreme ultraviolet lithography
Nanowire
Etching
Threshold voltage
Electron mobility
Fabrication
Diffraction
Extreme ultraviolet
CMOS
Quantum computer
Phase
Nanotechnology
Silicon on insulator
Image resolution
Lithography
Ion implantation
Short-channel effect
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Field-effect transistor
Interferometry
Silicon
Annealing
International System of Units
Leakage
Carbon nanotube
Doping
Extreme ultraviolet lithography
Nanowire
Etching
Threshold voltage
Electron mobility
Fabrication
Diffraction
Extreme ultraviolet
CMOS
Quantum computer
Phase
Nanotechnology
Silicon on insulator
Image resolution
Lithography
Ion implantation
Short-channel effect
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Jeffrey Bokor
Hungarian Academy Of Sciences
297
Jeffrey Bokor
University Of Illinois At Chicago
131
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