Monolithic Microfabricated Valves And Pumps By Multilayer Soft Lithography

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Authors: Marc A UngerHoupu ChouTodd ThorsenAxel SchererStephen R Quake
Published in: Science
Year: 2000   
DOI: 10.1126/science.288.5463.113
Citations: 1709
EI: NO
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Nanofabrication     Nano     Chemistry     Plasmonics     Nanowire     Material     Ion Beam     Lithography     Microfluidics     Laser     Optics     Chemical     Electron Beam     Electronics     Fabrication     Soft Lithography     Nanophotonics     Database     Fluidics     Vcsel     Plasma Etching     Photonic Crystal     Chemical Engineering     Photonics
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