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Stephen D Senturia
HIndex: 28
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Electrode
Surface micromachining
CAD
Microelectromechanical systems
Voltage
Microstructure
International System of Units
Curing
Fabrication
Material properties
Silicon
Diffraction grating
Residual stress
Solid modeling
Integrated circuit
Dielectric
Electrostatics
Etching
Thin film
Computer simulation
Computational model
Epoxy
Computer Aided Design
Finite element method
Damping
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Electrode
Surface micromachining
CAD
Microelectromechanical systems
Voltage
Microstructure
International System of Units
Curing
Fabrication
Material properties
Silicon
Diffraction grating
Residual stress
Solid modeling
Integrated circuit
Dielectric
Electrostatics
Etching
Thin film
Computer simulation
Computational model
Epoxy
Computer Aided Design
Finite element method
Damping
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Stephen D Senturia
Massachusetts Institute Of Technology
208
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