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Masayoshi Esashi
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Reactive-ion etching
Gold
Wafer
Electrode
Computer data storage
Actuator
Microstructure
International System of Units
Shape-memory alloy
Lithography
Surface micromachining
Chip
Thin film
Glass
Etching
Silicon
Pressure sensor
Carbon nanotube
Q factor
Atomic force microscopy
Packaging and labeling
Microelectromechanical systems
Oscillation
Fabrication
Resonance
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Reactive-ion etching
Gold
Wafer
Electrode
Computer data storage
Actuator
Microstructure
International System of Units
Shape-memory alloy
Lithography
Surface micromachining
Chip
Thin film
Glass
Etching
Silicon
Pressure sensor
Carbon nanotube
Q factor
Atomic force microscopy
Packaging and labeling
Microelectromechanical systems
Oscillation
Fabrication
Resonance
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Affiliation
Papers
Masayoshi Esashi
Tohoku Gakuin University
843
Masayoshi Esashi
Tohoku University
7
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